More error checks in Tramp's make-directory

More error checks in Tramp's make-directory

* lisp/net/tramp-adb.el (tramp-adb-handle-make-directory):
* lisp/net/tramp-gvfs.el (tramp-gvfs-handle-make-directory):
* lisp/net/tramp-sh.el (tramp-sh-handle-make-directory):
* lisp/net/tramp-smb.el (tramp-smb-handle-make-directory):
* lisp/net/tramp-sudoedit.el (tramp-sudoedit-handle-make-directory):
Signal `file-already-exists' if DIR exists.

* test/lisp/net/tramp-tests.el (tramp-test04-substitute-in-file-name):
Fix thinko.
(tramp-test13-make-directory, tramp-test14-delete-directory)
(tramp-test15-copy-directory): Extend tests.